SPECTRA-N On-Site Nitrogen Generators

Bringing the most cost-effective and reliable on-site choices for ultra-pure nitrogen to the world's largest semiconductor manufacturers


Our series of SPECTRA-N™ on-site nitrogen generators is the most cost-effective and reliable means of delivering ultra-pure nitrogen available today.

These generators bundle the benefits of patented technology, integrated engineering design and highly flexible operation.

Integrated packaged design minimizes both space and installation requirements and ensures that a plant is quickly assembled and easily connected to power and water services. Regardless of your volume needs, the SPECTRA family has the answer, scaling capacity from 6,000 to 50,000 Nm3 per hour.

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The benefits of a SPECTRA nitrogen generator include:

  • Ultra-pure gaseous and liquid nitrogen with less than 1 part per billion (ppb) impurities without the need for an external purifier
  • Cost-effective solution with much lower power consumption than conventional nitrogen generators
  • Excellent turn-down capabilities to meet facility ramp-up requirements
  • Continuous remote operation with up-time exceeding 99.8% under normal operating conditions
  • Ultra-pure liquid oxygen (LOX) with less than 10 ppb impurities without the need for an external purifier

SPECTRA-N On-Site Nitrogen Supply Volumes